microwave plasma cvd

基本解释

The diamond films were fabricated by microwave plasma CVD and the boron-doped was created by the cold ion implantation.
本文采用微波等离子体CVD法制备定向生长的金刚石薄膜。用冷离子注入法对金刚石薄膜进行硼掺杂。
The linearly coaxially coupled microwave plasma CVD device is a new microwave plasma CVD device bringing an axial extended plasma cylinder through a microwave antenna.
线形同轴耦合式微波等离子体CVD装置是一种利用微波天线产生轴向分布的等离子体柱的新型微波等离子体CVD装置。
In this paper, morphologies of poly crystal line diamond film and epitaxial single-crystal diamond film by microwave plasma CVD method were reported, the causes of these morphologies were analyzed.
本文给出了微波等离子体化学气相沉积多晶金刚石薄膜及外延单晶金刚石薄膜的各种形貌，并对这些形貌的形成做了理论分析。